发明名称 |
Röntgenprüfsystem sowie Verfahren zum Rotieren eines Prüfobjekts mittels eines solchen Röntgenprüfsystems |
摘要 |
An X-ray inspection system includes an X-ray source and a detector. A rotary table is arranged between the X-ray source and the detector. The rotary table is configured to secure a test object on the rotary table. The rotary table is arranged on a positioning table. The positioning table is configured to move parallel to an xy-plane between the X-ray source and the detector. The xy-plane is perpendicular to a surface of the detector extending parallel to the xz-plane and the rotary table is configured to rotate about a z-axis. |
申请公布号 |
DE112014004817(A5) |
申请公布日期 |
2016.07.07 |
申请号 |
DE20141104817T |
申请日期 |
2014.10.21 |
申请人 |
YXLON International GmbH |
发明人 |
Mecke, Andreas;Klein, Axel;Spalding, Jan |
分类号 |
G01N23/04 |
主分类号 |
G01N23/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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