Photomask blank and photomask for suppressing heat absorption

摘要

A photomask blank and/or photomask includes a light transmitting substrate, a highly reflective material layer disposed on the light transmitting substrate, and a transfer pattern layer disposed on the highly reflective material layer. The highly reflective material layer reflects light to be transmitted through the light transmitting substrate, with a predetermined reflectivity.

主权项

1. A photomask blank, comprising:
a light transmitting substrate; a highly reflective material layer disposed over the light transmitting substrate; and a light shielding layer disposed over the highly reflective material layer.