| 摘要 |
PROBLEM TO BE SOLVED: To provide a package for storing piezoelectric element and a piezoelectric device, in which an electric connection is improved while sufficiently ensuring a stable height from a substrate to the piezoelectric device.SOLUTION: A package for storing piezoelectric element 1 comprises: a substrate 2; a frame body 3 provided onto an upper surface of the substrate 2; a support part 4 which is provided for supporting a piezoelectric element in the upper surface of the substrate 2 in an inner side of the frame body 3 so as to be separated from the upper surface of substrate 2 and has a recessed part 41 in an upper part; a piezoelectric element connection electrode 5 which is provided in the upper part of the support part 4; an external connection electrode terminal 6 which is provided so as to overlap with the piezoelectric element connection electrode 5 at a lower surface of the substrate 2; and a penetration conductor 7 which penetrates the support part 4 and the substrate 2 in a vertical direction and electrically connects the piezoelectric element connection electrode 5 and the external connection electrode terminal 6. With the support part 4 including the recessed part 41, a peel strength of the piezoelectric element connection electrode 5 can be increased, and a bond strength of the piezoelectric element can be ensured.SELECTED DRAWING: Figure 3 |
