| 发明名称 |
WASHER AND WASHING METHOD |
| 摘要 |
PURPOSE: To provide a device improved so that soil on a substrate can be effectively removed. CONSTITUTION: This washer is provided with a jetting nozzle 11 for jetting droplets toward a substrate 1. To the jetting nozzle 11, a liquid feeding means 23 and a gas feeding means 22 are connected. Inside the jetting nozzle 11, a mixing means for mixing liquid and gas fed into the jetting nozzle 11 to turn the liquid into droplets is provided.
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| 申请公布号 |
JPH08318181(A) |
申请公布日期 |
1996.12.03 |
| 申请号 |
JP19950127984 |
申请日期 |
1995.05.26 |
| 申请人 |
MITSUBISHI ELECTRIC CORP;RYODEN SEMICONDUCTOR SYST ENG KK |
发明人 |
SUGANO ITARU;OMORI TOSHIAKI;TANAKA HIROSHI;DOI NOBUAKI |
| 分类号 |
B08B5/02;A62C5/00;B01F3/04;B01F5/04;B01F5/06;B05B7/00;B05D1/02;B08B3/02;B08B3/10;B24B53/007;H01L21/00;H01L21/304;H01L21/306;(IPC1-7):B05B7/00 |
主分类号 |
B08B5/02 |
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