METHOD AND DEVICE TO MANUFACTURE MAGNETIC RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method or the like of a magnetic recording medium in which the occurrence of deviation in processing shapes of divided recording elements and magnetic deterioration is suppressed and a magnetic recording medium having good magnetic characteristics is efficiently manufactured. SOLUTION: Ion beam etching is used as the dry etching method of a continuous recording layer 20. A resist layer 26 is removed before the dry etching of the continuous recording layer 20. Diamond like carbon is used as the material of a first mask layer which covers the continuous recording layer. COPYRIGHT: (C)2005,JPO&NCIPI