| 摘要 |
PROBLEM TO BE SOLVED: To efficiently acquire X rays of 1 keV or less as a result by intercepting visible light and infrared light and thinning an X-ray window to the greatest possible extent.SOLUTION: An X-ray analyzer 10 includes an electron gun 14, superconducting transition end sensor (TES) 15, collimator 33, first X-ray window 31, second X-ray window 32, first heat shield 21, and second heat shield 22. The electron gun 14 excites a sample 11 that is an object of analysis, and thus allows the sample to discharge characteristic X rays 13. The TES 15 detects the characteristic X rays 13. A cumulative film thickness of all aluminum films on the first X-ray window 31 and the second X-ray window 32 is equal to or larger than 150 nm and falls below 300 nm. The size of the collimator 33 is set to a size that confines a heat radiation quantity, which is irradiated to the TES 15 at the atmospheric temperature in a case where the first X-ray window 31 and the second X-ray window 32 do not exist, becomes equal to or smaller than 10 μW.SELECTED DRAWING: Figure 1 |
