| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a low thermal expansion ceramic joined body which can be manufactured at a low cost, has sufficient joining strength which can be of practical use, has high reliability in joining, has low thermal expansion, and a high rigidity and specific rigidity, and to provide a method for manufacturing the same. <P>SOLUTION: Planes to be joined of a plurality of members are brought into contact with each other and heat-treated to join the planes to be integrated to form a joined body, wherein the member is composed of a cordierite crystalline sintered body having an absolute value of the coefficient of thermal expansion in ambient temperature of 0.6×10<SP>-6</SP>/K or less, an elastic modulus of 100 GPa or more, and a specific rigidity of 40 GPa cm<SP>3</SP>/g. There is also provided a method for manufacturing the joined body. The sintered body contains Si in a condition that the percentage of Si in the constituent elements (Mg, Al, Si) of the sintered body is 51.5-70.0 mass% in terms of oxides thereof (MgO, Al<SB>2</SB>O<SB>3</SB>, SiO<SB>2</SB>). A surplus SiO<SB>2</SB>in the sintered body forms a liquid phase at the time of heating to activate mass transfer, thereby making the material at the joined part substantially the same as that of a preform to eliminate residual stress resulting from the difference of the coefficient of thermal expansion to provide a joined body having a very high joining strength. <P>COPYRIGHT: (C)2008,JPO&INPIT |
