发明名称 LAMINATE, KIT FOR MANUFACTURING ORGANIC SEMICONDUCTOR, AND RESIST COMPOSITION FOR MANUFACTURING ORGANIC SEMICONDUCTOR
摘要 Provided are a laminate which is capable of forming an excellent organic semiconductor pattern, a kit for manufacturing an organic semiconductor, which is used to manufacture such a laminate, and a resist composition for manufacturing an organic semiconductor, which is used for the kit for manufacturing an organic semiconductor.;The laminate includes an organic semiconductor film, a protective film on the organic semiconductor film, and a resist film on the protective film, in which the resist film is formed of a photosensitive resin composition that contains a photoacid generator (A) which generates an organic acid of which a pKa of the generated acid is −1 or less and a resin (B) which reacts with an acid generated by the photoacid generator so that the rate of dissolution in a developer containing an organic solvent is decreased.
申请公布号 US2016240816(A1) 申请公布日期 2016.08.18
申请号 US201615139989 申请日期 2016.04.27
申请人 FUJIFILM Corporation 发明人 MIZUTANI Kazuyoshi;IWAI Yu;KOYAMA Ichiro;KAMOCHI Yoshitaka
分类号 H01L51/52;G03F7/11;G03F7/004;G03F7/039;H01L51/42;B32B27/08 主分类号 H01L51/52
代理机构 代理人
主权项 1. A laminate comprising: an organic semiconductor film; a protective film on the organic semiconductor film; and a resist film on the protective film, wherein the resist film is formed of a photosensitive resin composition that contains a photoacid generator (A) which generates an organic acid of which a pKa of the generated acid is −1 or less and a resin (B) which reacts with an acid generated by the photoacid generator so that the rate of dissolution in a developer containing an organic solvent is decreased.
地址 Tokyo JP