MANUFACTURING METHOD OF SUBSTRATE GRAPHENE GROWTH WITHOUT USING METAL CATALYST AND SUBSTRATE GRAPHENE GROWTH WITHOUT USING METAL CATALYST AND MANUFACTURING DEVICE

摘要

Provided is a manufacturing method of catalyst-free substrate grown graphene, comprising the following steps: (a) preparing a substrate on which a substrate layer is formed; (b) supplying carbon-containing gas and conducting low pressure chemical vapor deposition (LPCVD); and (c) growing graphene on the substrate layer without comprising a catalyst layer.