发明名称 FLUORINE-CONTAINING PHOTOSENSITIVE COMPOSITION
摘要 <P>PROBLEM TO BE SOLVED: To provide a fluorine-containing photosensitive composition which is a photosensitive liquid-repellent finishing agent capable of being patterned by photolithography, satisfies both of liquid repellency and photosensitivity, and has all of adhesion to a substrate, hardness of a liquid-repellent coating film and environmental adaptation. <P>SOLUTION: The fluorine-containing photosensitive composition includes a fluorine compound (A), at least one metal compound (B) selected from the group consisting of a hydrolyzable metal alkoxide, a hydrolyzed compound thereof and a condensate thereof, a solvent (C) and a photoacid generator (D) as essential components. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008015084(A) 申请公布日期 2008.01.24
申请号 JP20060184319 申请日期 2006.07.04
申请人 DAIKIN IND LTD 发明人 MORITA MASAMICHI
分类号 G03F7/075;C08F290/04;G03F7/038;H01L21/027 主分类号 G03F7/075
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