| 发明名称 | Scanning electron microscope | ||
| 摘要 | A scanning electron microscope suitable for imaging samples in a non-vacuum environment, the scanning electron microscope including an electron source located within an enclosure maintained under vacuum, an electron permeable membrane disposed at an opening of the enclosure separating an environment within the enclosure which is maintained under vacuum and an environment outside the enclosure which is not maintained under vacuum, the electron permeable membrane not being electrically grounded and at least one non-grounded electrode operative as an electron detector. | ||
| 申请公布号 | US9466458(B2) | 申请公布日期 | 2016.10.11 |
| 申请号 | US201414768641 | 申请日期 | 2014.02.18 |
| 申请人 | B-NANO LTD. | 发明人 | Shachal Dov;De Picciotto Rafi |
| 分类号 | H01J37/28;H01J37/18;H01J37/244 | 主分类号 | H01J37/28 |
| 代理机构 | Sughrue Mion, PLLC | 代理人 | Sughrue Mion, PLLC |
| 主权项 | 1. A scanning electron microscope suitable for imaging samples in a non-vacuum environment, the scanning electron microscope comprising: an electron source located within an enclosure maintained under vacuum; an electron permeable membrane disposed at an opening of said enclosure separating an environment within said enclosure which is maintained under vacuum and an environment outside said enclosure which is not maintained under vacuum, said electron permeable membrane not being electrically grounded; and at least one non-grounded electrode operative as an electron detector. | ||
| 地址 | Rehovot IL | ||