| 摘要 |
PROBLEM TO BE SOLVED: To form a pixel electrode and a metal film, using one resist mask, when making a laminated structure by forming the metal film on the pixel electrode.SOLUTION: A conductive film and a metal film that serve as a pixel electrode are laminated. A resist pattern, having a thick film region and a region with a film thickness smaller than that of the thick film region, is formed on the metal film, by using an exposure mask having a semipermeable section. The pixel electrode and the metal film in contact with a portion of the pixel electrode, are formed by using the resist pattern. As a result, the pixel electrode and the metal film can be formed by using one resist mask.SELECTED DRAWING: Figure 2 |
