发明名称 デバイスの集積回路を試験するためのシステム及びその使用方法
摘要 A method of testing an integrated circuit of a device is described. Air is allowed through a fluid line to modify a size of a volume defined between the first and second components of an actuator to move a contactor support structure relative to the apparatus and urge terminals on the contactor support structure against contacts on the device. Air is automatically released from the fluid line through a pressure relief valve when a pressure of the air in the fluid line reaches a predetermined value. The holder is moved relative to the apparatus frame to disengage the terminals from the contacts while maintaining the first and second components of the actuator in a substantially stationary relationship with one another. A connecting arrangement is provided including first and second connecting pieces with complementary interengaging formations that restricts movement of the contactor substrate relative to the distribution board substrate in a tangential direction.
申请公布号 JP6013423(B2) 申请公布日期 2016.10.25
申请号 JP20140212000 申请日期 2014.10.16
申请人 エイアー テスト システムズ 发明人 リンゼイ スコット イー;イェ ジュンジェ;ジョヴァノヴィック ジョヴァーン;マラソン シェーン ピー
分类号 H01L21/66;G01R31/28;G01R31/30 主分类号 H01L21/66
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