2D TUNABLE NANOSPHERE LITHOGRAPHY OF NANOSTRUCTURES

摘要

Various examples are provided for two-dimensional (2D) tunable nanosphere lithography of nanostructures. In one example, a method includes disposing a pattern of nanospheres on a surface of a substrate by, e.g., spin-coating a colloidal suspension including the nanospheres, forming a porous metal film on the surface of the substrate, and forming a plurality of nanostructures by chemically etching the substrate. The pattern of nanospheres can be a hexagonal pattern, where spacing between the nanospheres is independent of the particle size. The porous metal film can include a hexagonal pattern of pores defined by the nanospheres and the plurality of nanostructures can be defined by the hexagonal pattern of pores of the porous metal film.