| 摘要 |
PURPOSE:To perform the title surface treatment designed to improve metallizability by dissolving the surface of an AlN ceramic through chemical etching to form grain boundary grooves of network structure followed by oxidation treatment to produce an Al2O3 film on the surface. CONSTITUTION:An AlN ceramic 1 is first immersed at room temperature in an aqueous NaOH solution to dissolve the surface through chemical etching, thus forming a network structure with grain boundaries and part of the AlN grains etched. Thence, the resulting ceramic surface is put to oxidation treatment to produce a surface treatment layer 2 constituting an Al2O3 layer with grain boundary gaps. The resultant ceramic is then subjected to thick film metallization to form a metallizing layer 5 made up of (A) an oxide layer 3 to be bound to the Al2O3 through fluidization into the gaps and (B) a metal layer 4. And, the surface-treated AlN ceramic is coated with a metal alkoxide to fill the gaps followed by baking under heating to form an oxide film and then metallization to produce a metallizing film with higher adhesivity. |
