发明名称 |
PHOTOSENSITIVE RESIN COMPOSITION, LAMINATE THEREOF, CURED PRODUCT THEREOF AND PATTERN FORMING METHOD USING COMPOSITION |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a photosensitive resin composition from which a pattern having high resolution and a high aspect ratio is formed and which has high sensitivity. <P>SOLUTION: The photosensitive resin composition contains: a photo-cationic polymerization initiator (A) which is sulfonium tris(pentafluoroethyl)trifluorophosphate; and a bisphenol fluorene epoxy resin (B) represented by formula (1), wherein R represents an alkylene group and n is an average and represents a positive real number of 0-30. <P>COPYRIGHT: (C)2008,JPO&INPIT |
申请公布号 |
JP2008020842(A) |
申请公布日期 |
2008.01.31 |
申请号 |
JP20060194612 |
申请日期 |
2006.07.14 |
申请人 |
NIPPON KAYAKU CO LTD;MICROCHEM CORP |
发明人 |
SAKAI AKIRA;URATA MASAHIKO |
分类号 |
G03F7/038;G03F7/004;G03F7/029;G03F7/40;H01L21/027 |
主分类号 |
G03F7/038 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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