发明名称 PHOTOSENSITIVE RESIN COMPOSITION, LAMINATE THEREOF, CURED PRODUCT THEREOF AND PATTERN FORMING METHOD USING COMPOSITION
摘要 <P>PROBLEM TO BE SOLVED: To provide a photosensitive resin composition from which a pattern having high resolution and a high aspect ratio is formed and which has high sensitivity. <P>SOLUTION: The photosensitive resin composition contains: a photo-cationic polymerization initiator (A) which is sulfonium tris(pentafluoroethyl)trifluorophosphate; and a bisphenol fluorene epoxy resin (B) represented by formula (1), wherein R represents an alkylene group and n is an average and represents a positive real number of 0-30. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008020842(A) 申请公布日期 2008.01.31
申请号 JP20060194612 申请日期 2006.07.14
申请人 NIPPON KAYAKU CO LTD;MICROCHEM CORP 发明人 SAKAI AKIRA;URATA MASAHIKO
分类号 G03F7/038;G03F7/004;G03F7/029;G03F7/40;H01L21/027 主分类号 G03F7/038
代理机构 代理人
主权项
地址