| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a low-cost two-dimensional radiation detector having high X-ray conversion efficiency by improving productivity by using a semiconductor conversion layer for directly converting an X-ray into a charge signal. SOLUTION: A prismatic CdZnTe polycrystal 2 is made by cutting out a CdZnTe polycrystal wafer 1 in a square pole-like form. A detector element 9 is made by forming electrodes 3 on the upper and lower surfaces of the prismatic CdZnTe polycrystal 2. A collimator plate 4 is machined by using a thin plate made of tungsten or the like. An insulating films 5 is formed on the surface of the collimator plate 4, and a pattern electrode 6 is formed on top of it. The detector element 9 is stuck and electrically connected to the side face of the collimator plate 4. The detector elements 10 with the collimator plate made life this are combined corresponding to the number of total channels by using a special jig, so that the entire radiation detector is manufactured.
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