| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection method and a surface inspection device capable of detecting the presence of a film in a container and its film quality, allowing inspection in a short time, and suitable for thin film inspection in quality control for a product. SOLUTION: An inspecting agent W is deposited on an inner face of an inspected object 20. The inspected object 20 is set in a surface inspection device 1, and is irradiated with an inspection beam L by a light emitting means 11. The inspection beam L transmitted through the inspected object 20 is photoreceived by a photoreception means 12. A photoreception quantity (transmission luminous energy) of the inspection beam L is measured by a measuring means 16. The presence of the thin film in the inspected object 20 and its film quality are judged based on the measured transmission luminous energy. COPYRIGHT: (C)2005,JPO&NCIPI
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