发明名称 |
DETECTION OF NONTRANSIENT PROCESSING ANOMALIES IN VACUUM MANUFACTURING PROCESS |
摘要 |
<p>A sensor, such as a mass spectrometer, capable of detecting the presence of materials in a sampled gas is interconnected with a processing chamber of a vacuum manufacturing tool. The sensor includes a timing circuit which is activated only if certain levels of specific materials are detected. Furthermore, the timer is set to run a predetermined time interval after activation so as to discriminate between known transient processing conditions and the presence of impurities which can greatly influence the manufacturing process. When the timer exceeds the predetermined time duration, an output signal can alert the process operator or automatically shutdown the manufacturing tool.</p> |
申请公布号 |
EP1103071(A4) |
申请公布日期 |
2006.06.14 |
申请号 |
EP19990937408 |
申请日期 |
1999.07.22 |
申请人 |
LEYBOLD INFICON, INC. |
发明人 |
FREES, LOUIS, C.;RIO, VALENTIN |
分类号 |
H01L21/00;H01L21/66;(IPC1-7):H01L21/66;G01R31/26 |
主分类号 |
H01L21/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|