| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mechanical mass sensor of structure in which its sensor area is not enlarged, while accurately detecting mechanical mass. <P>SOLUTION: The sensor includes a first substrate (silicon sensor substrate) having a first mechanical mass detecting means (for example, capacitive acceleration sensor) and a second substrate (silicon sensor substrate) having a second mechanical mass detecting means (for example, piezo pressure sensor) to contact the first substrate. In the sensor, the second substrate faces and contacts the first substrate to form sealing space, then seals the first mechanical mass detecting means into this sealing space to protect the first mechanical mass detecting means. <P>COPYRIGHT: (C)2008,JPO&INPIT |
