| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a fuel cell separator suppressing increase in contact resistance. <P>SOLUTION: The manufacturing method for the fuel cell separator includes a first process preparing a substrate for a separator (10), and a second process forming a film of Ti film (11) or TiN film (20) by a dry coat method while applying bias voltage which is a specified value or less on a surface of the separator substrate. Generation of TiC can be suppressed in the Ti film or the TiN film. Thus, generation of TiO<SB>2</SB>due to oxidation of TiC can be suppressed. <P>COPYRIGHT: (C)2008,JPO&INPIT |
