| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of carrying out the formation of the concavity and convexity on a silicon substrate surface for use in a solar battery in particular efficiently and with high tact. <P>SOLUTION: The method of manufacturing a solar battery comprises a step of forming a concavity and a convexity on the surface of a polysilicon substrate by a reactive ion etching method using first etching gas comprising H<SB>2</SB>O. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
