THIN FILM DEPOSITION COMPOSITION CONTAINING GERMANIUM DERIVATIVE, THE GERMANIUM-CONTAINING THIN FILM PREPARED BY USING THE SAME AND THE METHOD OF PRODUCING A GERMANIUM-CONTAINING THIN FILM USING THE SAME

摘要

The present invention relates to a composition including a germanium derivative which can be used as a precursor for the formation of various germanium-containing thin films, a germanium-containing thin film manufactured by using the same, and a method for manufacturing a germanium-containing thin film using the same.