| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for adjusting a resistance value of an electronic device, which can achieve high accuracy in adjustment of the resistance value and improve through-put of trimming time.SOLUTION: The method for adjusting a resistance value of an electronic device 1 having an insulating base material 2, a resistance film 3 and an interdigital electrode 4 formed to have a plurality of comb-shaped parts 4a includes: a process for measuring a resistance value of the electronic device; a rough adjustment process for cutting the comb-shaped parts 4a by radiating a laser beam; and a fine adjustment process for cutting the resistance film by radiating the laser beam after the rough adjustment process. In the rough adjustment process, the entire cut-off length of the comb-shaped parts 4a in a case where the resistance value of the electronic device reaches a target resistance value at the time of cut-off is obtained by calculation, and such a number of the comb-shaped parts 4a are cut off in such a position as to make the cut-off length shorter then the entire cut-off length. In the fine adjustment process, while the resistance value of the electronic device is being measured, the resistance film 3 is cut off until the resistance value of the electronic device reaches the target resistance value.SELECTED DRAWING: Figure 1 |
