| 摘要 |
The present invention enables the user to measure process line shortening (PLS) on an overlay tool. In an example embodiment ( 900 ), to obtain the PLS, the user applies a method to determine the misalignment (MA) of a composite image on a substrate ( 940 a), from the composite image the user may determine the total line ( 940 b) shortening (TLS) and the equipment line ( 940 c) shortening (ELS). The process line shortening (PLS) is determined ( 940 d) as a function of TLS and ELS.
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