| 摘要 |
PROBLEM TO BE SOLVED: To shorten a regeneration time of a cryopump.SOLUTION: A cryopump system includes a cryopump 10, and a regeneration control unit 102 configured to control the cryopump 10 according to a regeneration sequence containing discharge processing of discharging a condensate from the cryopump 10 and of executing roughing of the cryopump 10. The generation control unit 102 includes a pressure drop rate calculation unit 114 configured to calculate a pressure drop rate in the cryopump 10 during roughing of the cryopump 10, and includes a pressure drop rate monitoring unit 116 configured to detect contraction of the pressure drop rate during roughing.SELECTED DRAWING: Figure 2 |
