| 发明名称 | Piezoelectric thin-film resonator, filter and duplexer utilizing a piezoelectric film having an air space | ||
| 摘要 | A piezoelectric thin-film resonator includes, a substrate, a piezoelectric film provided on the substrate, and a lower electrode and an upper electrode that face each other through the piezoelectric film. The piezoelectric film has an air space that is provided in at least part of an outer circumferential part of a resonance region in which the upper and lower electrodes face each other through the piezoelectric film and is not provided in a central part of the resonance region. | ||
| 申请公布号 | US9496848(B2) | 申请公布日期 | 2016.11.15 |
| 申请号 | US201414527273 | 申请日期 | 2014.10.29 |
| 申请人 | TAIYO YUDEN CO., LTD. | 发明人 | Yokoyama Tsuyoshi;Nishihara Tokihiro;Sakashita Takeshi |
| 分类号 | H03H9/70;H03H9/54;H03H9/15;H03H9/17;H03H9/02;H03H9/58;H01P5/02;H01P7/08;H01P11/00 | 主分类号 | H03H9/70 |
| 代理机构 | Chen Yoshimura LLP | 代理人 | Chen Yoshimura LLP |
| 主权项 | 1. A piezoelectric thin-film resonator comprising: a substrate; a piezoelectric film provided on the substrate; and a lower electrode and an upper electrode that face each other through the piezoelectric film, the piezoelectric film having an air space that is provided in at least part of an outer circumferential part of a resonance region in which the upper and lower electrodes face each other through the piezoelectric film and is not provided in a central part of the resonance region, wherein the air space is exposed to neither an upper surface nor a lower surface of the piezoelectric film and is not located in a region other than the resonance region. | ||
| 地址 | Tokyo JP | ||