| 发明名称 |
METHOD OF MANUFACTURING PELLICLE ASSEMBLY AND METHOD OF PHOTOMASK ASSEMBLY INCLUDING THE SAME |
| 摘要 |
A method of manufacturing a pellicle assembly, the method including attaching a carbon-containing thin film onto a transfer membrane in a wet atmosphere; attaching the carbon-containing thin film to a pellicle frame in a dry atmosphere while the carbon-containing thin film is attached onto the transfer membrane; and separating the transfer membrane from the carbon-containing thin film while the carbon-containing thin film is attached to the pellicle frame. |
| 申请公布号 |
US2016355001(A1) |
申请公布日期 |
2016.12.08 |
| 申请号 |
US201615014054 |
申请日期 |
2016.02.03 |
| 申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KIM MUN JA;KIM Byung-Gook;JEON HWAN CHUL;YOO Ji-Beom;SHIN Dong-Wook;KIM Taesung;KIM Sooyoung |
| 分类号 |
B32B37/00;B32B37/14 |
主分类号 |
B32B37/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of manufacturing a pellicle assembly, the method comprising:
attaching a carbon-containing thin film onto a transfer membrane in a wet atmosphere; attaching the carbon-containing thin film to a pellicle frame in a dry atmosphere while the carbon-containing thin film is attached onto the transfer membrane; and separating the transfer membrane from the carbon-containing thin film while the carbon-containing thin film is attached to the pellicle frame. |
| 地址 |
Suwon-si KR |
