发明名称
摘要 PURPOSE:To suppress the thermal convection in the molten liquid of raw material, and to obtain a single crystal having high uniformity, by imposing a magnetic field having high magnetic field strength and broad optimum range of the field to a molten liquid, thereby decreasing the thermal oscillation. CONSTITUTION:The molten liquid 61 of raw material can be classified into the 1st region having high thermal oscillation, the 2nd region having decreased thermal oscillation, the 3rd region in which the thermal oscillation increases again, and the 4th region in which the thermal oscillation decreases again, in connection with the thermal oscillation characteristics caused by the increase of the magnetic field strength. A magnetic field sufficiently strong to give the 4th region is applied to the molten liquid 61 in the crucible 42. The seed crystal 63 is made to contact with the molten liquid 61, and pulled up vertically to obtain a single crystal.
申请公布号 JPH06102589(B2) 申请公布日期 1994.12.14
申请号 JP19850026742 申请日期 1985.02.14
申请人 发明人
分类号 C30B15/22;C30B15/30;C30B27/02;C30B29/40;C30B29/42;H01L21/18;H01L21/208;(IPC1-7):C30B15/22 主分类号 C30B15/22
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