| 摘要 |
PURPOSE:To detect pressure parallel to a surface by providing a patterned magneto-resistance element (MR) and a magnetic body which is magnetized vertically in different directions at the part facing the MR and other parts. CONSTITUTION:The MR2 is patterned on a substrate 1 with an insulating layer 7 between. A protection layer 8 and a soft material 3 are provided between the MR2 and magnetic body 4'. The substrate 1 is provided with the 2nd magnetic body 6 in the same pattern with the MR2. When a magnetic field is applied externally, the magnetic field is converged by the magnetic body 6. The magnetic body 4' is magnetized vertically in different directions at the part facing the pattern of the MR2 and other parts. When pressure is applied in a direction X parallel to the surface of a pressure sensor, there is some difference generated between the pattern of the MR2 and the pattern of vertical magnetism and the magnetic field applied to the MR2 is weakened. Thus, the pressure in the parallel direction X is detected. |
