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发明名称
VERFAHREN ZUR HERSTELLUNG EINER DÜNNEN SCHICHT MITTELS REAKTIVER KATHODENZERSTÄUBUNG
摘要
申请公布号
AT155827(T)
申请公布日期
1997.08.15
申请号
AT19940870066T
申请日期
1994.04.14
申请人
RECHERCHE ET DEVELOPPEMENT GROUPE COCKERILL SAMBRE
发明人
WINAND, RENE (U.L.B.);LUCAS, STEPHANE;VANDEN BRANDE, PIERRE;WEYMEERSCH, ALAIN;RENARD, LUCIEN
分类号
C23C14/34;C23C14/56;C23C16/50;H01L21/203;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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