| 摘要 |
PROBLEM TO BE SOLVED: To improve the orientability of magnetic films and to make crystal grains finer and more uniform by arranging first ground surface films directly or via third ground surface films on a substrate, directly arranging second ground surface films on these first ground surface films, arranging the magnetic films on these second ground surface films and dispersing clusters having a large oxygen quantity at the boundary between the first ground surface films and the second ground surface films. SOLUTION: The third ground surface films consisting of, for example, metallic film, are formed on the glass substrate and the single layer films consisting of 68wt.% Co-24wt.% are formed as the first ground surface films thereon. the alloy forming the first ground surface films contains >= kinds of element of 150(kJ/mol O2 ) in the difference of the oxide forming standard free energyΔG<o> at 250 deg.C. PO2 . (PO2 is an oxygen partial pressure and (t) is the time of exposure) is exposed to an atmosphere contg. oxygen at >=1×10<-6> to <=1×10<-2> (Torr. sec). The decrease of medium noise, the increase of coercive force, etc., are made possible. |
