| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a support for objects to be treated by which uniformity of in-plane film thickness of the object to be treated can be largely improved. SOLUTION: A support 44 for objects to be treated supports multiple objects W to be heat treated in a vertical heat treating furnace at specified pitches. The support 44 is provided with multiple columns 2, plate members 54 of approximately the size of the objects W or larger which are provided at specified pitches on the columns, support protrusions 12 in contact with the periphery of the back of the objects W which support them, and plural gas passing holes 58 spread on the plate members 54. In this way, the passage of the gas in the center of the object can be promoted and the uniformity of in-plane thickness of the object can be largely improved.</p> |
