| 摘要 |
PROBLEM TO BE SOLVED: To allow stacking at higher precision when mix-and-match is performed between devices for step-and-scan exposure. SOLUTION: Related to an exposure method using mix-and-match method while a plurality of step-and-scan type exposure devices are used, a second exposure is performed scanning in the direction orthogonal to the scan direction at first exposure. Thus, when mix-and-match is performed between devices for step-and-scan exposure, stacking at higher precision is allowed. |
