| 摘要 |
An apparatus and methods of utilizing a semi-permeable membrane to concentrate contaminants in a portion of an Ultra Pure Water stream to levels which are detectable by an on-line analyzer. This allows the use of analyzers that would not be able to accurately detect contaminant concentrations in the Ultra Pure Water stream. Thus, by knowing the concentration factor and the level of contaminants in the concentrated stream indicated by the analyzer the real level of contamination can be back calculated.
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