| 摘要 |
PROBLEM TO BE SOLVED: To restrain reaction product in exhaust gas from attaching to the inner wall of an exhaust tube in a film forming apparatus. SOLUTION: An introduction tube 31 of ballast gas is made to join an exhaust tube 21 from a film formation part 10. The exhaust pressure of the exhaust tube 21 is controlled by the flow rate of the ballast gas. A heater 40 is also provided to the ballast gas introduction tube 31, and ballast gas is warmed. The exhaust tube 21 is provided with a temperature sensor 42, and the heater 40 is subjected to feed back control to set an exhaust gas temperature as prescribed, thus adjusting the warming temperature of ballast gas. When the flow rate of ballast gas decreases, the warming temperature increases. COPYRIGHT: (C)2006,JPO&NCIPI
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