| 摘要 |
<p>A system for integrating semiconductor wafer data for use in silicon manufacturing and device fabrication processes, the system including: a data acquisition system (00) capable of acquiring scan data from differing types of semiconductor wafer scanning tools such as wafer dimensional tools (10), wafer inspection tools (12), and wafer nanotopography tools (14), a buffer system (02) for providing temporary storage for scan data transmitted and for providing fault tolerance; a server system (04) for providing storage for the scan data transmitted from the buffer system (02) and for converting the scan data into a format used by and stored in a database (08) management system; and an analysis system (06), the analysis system (06) and the server system (04) providing wafer data management, process monitoring, wafer data analysis, and data automation.</p> |
