SOFT MAGNETIC FILM, METHOD OF MANUFACTURING SOFT MAGNETIC FILM, THIN FILM MAGNETIC HEAD THAT USES SOFT MAGNETIC FILM, AND METHOD OF MANUFACTURING THIN FILM MAGNETIC HEAD

摘要

A soft magnetic film and a method of manufacturing the soft magnetic film are provided. The soft magnetic film is plated with Fe and Ni, Fe and Co, or Fe, Ni and Co. A ratio Cl/Fe of ion strengths between negative-charged Fe and Cl and a ratio S/Fe of ion strengths between negative-charged Fe and S are less than about 10 in measurement by a time-of-flight secondary ion mass spectrometry.