| 摘要 |
PROBLEM TO BE SOLVED: To simply and instinctively know the distribution and tendency of defects appearing on the whole semiconductor wafer on which a plurality of imaging elements are formed without requiring complicated operation. SOLUTION: Image data P, Q, R, S obtained from respective imaging elements 14 formed on a semiconductor wafer 16 are mapped on virtual positions corresponding to positions on the semicoductor wafer 16 to generate synthetic image data 18, and a synthetic image based on the synthetic image data 18 is displayed on a display device 11. COPYRIGHT: (C)2008,JPO&INPIT
|
