| 摘要 |
PROBLEM TO BE SOLVED: To prevent an unnecessary space from being formed in a furnace opening, to prevent a gas from being entrained, and to prevent a foreign material from mixing, in a substrate processing apparatus of a boat exchange type. SOLUTION: The substrate processing apparatus is equipped with: a treatment room for accommodating and processing a substrate; an opening 4 for carrying the substrate in the treatment room and for taking out the substrate from the treatment room; closure means 5 for locking out the opening 4; a substrate holder 7 which holds the substrate in the treatment room and is mounted in the closure means 5; and attachment and detachment means for attaching and detaching the substrate holder 7 taken out from the treatment room to the closure means 5, wherein a mixing prevention member 15 for narrowing an inner diameter of the opening 4 is provided in the opening 4. COPYRIGHT: (C)2008,JPO&INPIT
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