| 摘要 |
PROBLEM TO BE SOLVED: To suppress the adhesion of particles to a base board.SOLUTION: A base board storage system 100 comprises a stocker 101 which is arranged at a clean room 200, and stores a cassette 302 for holding a base board 301, and a loader 102. The stocker 101 comprises first air introduction means 113, and a first opening 115 which can make the base board 301 stored in any place of the cassette 302 pass. The loader 102 comprises second air introduction means 123, a third opening 125 which carries in and out the base board 301 between the clean room 200 and itself, and a fourth opening 127 which is opened at the clean room 200 side.SELECTED DRAWING: Figure 2 |
