Low resistance LDMOS with reduced gate charge

摘要

An integrated circuit containing an MOS transistor with a drain drift region adjacent to the channel region, a field oxide element in the drain region, a first gate section over the channel region and a second gate section over the field oxide element, with a gap between the gate sections so that at least half of the drift region is not covered by gate. A process of forming an integrated circuit containing an MOS transistor with a drain drift region adjacent to the channel region, a field oxide element in the drain region, a first gate section over the channel region and a second gate section over the field oxide element, with a gap between the gate sections so that at least half of the drift region is not covered by gate, so that the source/drain implant is blocked from the drift region below the gap.

主权项

1. An integrated circuit, comprising:
a metal oxide semiconductor (MOS) transistor with a drain region adjacent to a channel region of said MOS transistor, said MOS transistor including: a drain insulator in said drain region between said channel region and a drain contact region in said drain region, so that said drain region extends under said drain insulator; a drift region in the drain region between the channel region and the drain insulator; a gate, said gate including:
a first gate section over said channel region; anda second gate section over said drain insulator such that the second gate section does not overlap the drift region;the first gate section dimensioned such that at least half of said drift region is not covered by said gate; andan implant blocking section between said first gate section and said second gate section, said implant blocking section being formed of gate sidewall material on lateral surfaces of said first gate section and said second gate section.