发明名称 |
METHODS OF FABRICATING POLYGON-SECTIONAL RODLIKE INGOT AND SUBSTRATE WITH ORIENTATION MARKER OR ROUNDED CORNERS, RODLIKE INGOT AND SUBSTRATE |
摘要 |
The present invention discloses a method of forming a polygon-sectional rodlike ingot having an orientation marker or rounded corners, a rodlike ingot and a sheet substrate so formed. The method comprises: selecting one of sides of the polygon-sectional rodlike ingot that is parallel to an axial direction thereof as a first feature of a surface orientation marker; forming a minisize notch, which is parallel to an edge, in the one of sides selected as the first feature in the axial direction of the rodlike ingot, as a second feature of the orientation marker; and processing the rodlike ingot to form rounded corners. The sheet substrate is obtained by cutting the rodlike ingot. |
申请公布号 |
US2016201220(A1) |
申请公布日期 |
2016.07.14 |
申请号 |
US201314895179 |
申请日期 |
2013.12.27 |
申请人 |
INSTITUTE OF SEMICONDUCTORS, CHINESE ACADEMY OF SCIENCES |
发明人 |
LI Jinmin;WANG Junxi;YI Xiaoyan;KONG Qingfeng;WANG Wenjun;HU Qiang;YAN Jianchang;WEI Tongbo;MA Ping;LU Hongxi;JI Panfeng;GUO Jinxia |
分类号 |
C30B25/18;B28D5/04;C30B29/16;C30B29/66;C30B29/64 |
主分类号 |
C30B25/18 |
代理机构 |
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代理人 |
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主权项 |
1. A method of forming a polygon-sectional rodlike ingot having an orientation marker, the method comprising:
selecting one of sides of the polygon-sectional rodlike ingot that is parallel to an axial direction thereof as a first feature of a surface orientation marker; forming a minisize notch, which is parallel to an edge of the rodlike ingot, in the one of sides having the first feature in the axial direction of the rodlike ingot, as a second feature of the surface orientation marker. |
地址 |
Beijing CN |