发明名称 METHODS OF FABRICATING POLYGON-SECTIONAL RODLIKE INGOT AND SUBSTRATE WITH ORIENTATION MARKER OR ROUNDED CORNERS, RODLIKE INGOT AND SUBSTRATE
摘要 The present invention discloses a method of forming a polygon-sectional rodlike ingot having an orientation marker or rounded corners, a rodlike ingot and a sheet substrate so formed. The method comprises: selecting one of sides of the polygon-sectional rodlike ingot that is parallel to an axial direction thereof as a first feature of a surface orientation marker; forming a minisize notch, which is parallel to an edge, in the one of sides selected as the first feature in the axial direction of the rodlike ingot, as a second feature of the orientation marker; and processing the rodlike ingot to form rounded corners. The sheet substrate is obtained by cutting the rodlike ingot.
申请公布号 US2016201220(A1) 申请公布日期 2016.07.14
申请号 US201314895179 申请日期 2013.12.27
申请人 INSTITUTE OF SEMICONDUCTORS, CHINESE ACADEMY OF SCIENCES 发明人 LI Jinmin;WANG Junxi;YI Xiaoyan;KONG Qingfeng;WANG Wenjun;HU Qiang;YAN Jianchang;WEI Tongbo;MA Ping;LU Hongxi;JI Panfeng;GUO Jinxia
分类号 C30B25/18;B28D5/04;C30B29/16;C30B29/66;C30B29/64 主分类号 C30B25/18
代理机构 代理人
主权项 1. A method of forming a polygon-sectional rodlike ingot having an orientation marker, the method comprising: selecting one of sides of the polygon-sectional rodlike ingot that is parallel to an axial direction thereof as a first feature of a surface orientation marker; forming a minisize notch, which is parallel to an edge of the rodlike ingot, in the one of sides having the first feature in the axial direction of the rodlike ingot, as a second feature of the surface orientation marker.
地址 Beijing CN