PRODUCTION METHOD OF ALUMINUM-CONTAINING OXIDE THIN FILM, AND ALUMINUM-CONTAINING OXIDE THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a production method of an aluminium-containing oxide thin film capable of improving a deposition rate of the aluminium-containing oxide thin film, and to provide an aluminium-containing oxide thin film produced by the production method.SOLUTION: An aluminium-containing oxide thin film is deposited by an atomic layer deposition method by using an aluminium-containing composition containing trimethylaluminum and dimethylaluminum hydride and an oxygen-containing compound containing oxygen atoms as raw materials.SELECTED DRAWING: None