| 发明名称 |
MICRO-MACHINED OPTICAL PRESSURE SENSORS |
| 摘要 |
A micro-machined optical pressure sensor, comprising: a diaphragm configured to deform when a force is applied thereto; and a sensing micro-ring spaced apart from the diaphragm by a gap, the gap being variable depending on the force applied on the diaphragm, wherein the sensing micro-ring is configured to produce a resonance wavelength shift when the gap is varied, the resonance wavelength shift indicative of the force applied to the diaphragm. |
| 申请公布号 |
US2016273980(A1) |
申请公布日期 |
2016.09.22 |
| 申请号 |
US201415036792 |
申请日期 |
2014.11.14 |
| 申请人 |
AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH ;NANYANG TECHNOLOGICAL UNIVERSITY |
发明人 |
CAI Hong;TAO Jifang;TSAI Julius Ming-Lin;LIU Aiqun |
| 分类号 |
G01L1/24;G01L11/02 |
主分类号 |
G01L1/24 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A micro-machined optical pressure sensor, comprising:
a diaphragm configured to deform when a force is applied thereto; and a sensing micro-ring spaced apart from the diaphragm by a gap, the gap being variable depending on the force applied on the diaphragm, wherein the sensing micro-ring is configured to produce a resonance wavelength shift when the gap is varied, the resonance wavelength shift indicative of the force applied to the diaphragm. |
| 地址 |
Connexis SG |
