发明名称 |
Systems and methods for forming apertures in microfeature workpieces |
摘要 |
Systems and methods for forming apertures in microfeature workpieces are disclosed herein. In one embodiment, a method includes directing a laser beam toward a microfeature workpiece to form an aperture and sensing the laser beam pass through the microfeature workpiece in real time. The method can further include determining a number of pulses of the laser beam and/or an elapsed time to form the aperture and controlling the laser beam based on the determined number of pulses and/or the determined elapsed time to form a second aperture in the microfeature workpiece. |
申请公布号 |
US9452492(B2) |
申请公布日期 |
2016.09.27 |
申请号 |
US201414242390 |
申请日期 |
2014.04.01 |
申请人 |
Micron Technology, Inc. |
发明人 |
Watkins Charles M.;Hiatt William M. |
分类号 |
B23K26/03;B23K26/38;H01L21/768;H05K3/00;H01L21/48;B23K26/36;B23K26/40 |
主分类号 |
B23K26/03 |
代理机构 |
Perkins Coie LLP |
代理人 |
Perkins Coie LLP |
主权项 |
1. A method for forming an aperture in a microfeature workpiece, the method comprising:
positioning the microfeature workpiece between a laser and an electromagnetic radiation sensor; directing a laser beam from the laser toward the microfeature workpiece to form a first hole in the microfeature workpiece while the microfeature workpiece is positioned between the laser and the electromagnetic radiation sensor; determining a number of pulses of the laser beam and/or an elapsed time to form the first hole by sensing when the laser beam passes through the microfeature workpiece with the sensor; determining a desired depth for a second hole in the microfeature workpiece; and automatically controlling the laser beam to form a plurality of second holes based on the determined number of pulses and/or the determined elapsed time, a depth of the first hole, and the desired depth of the second hole. |
地址 |
Boise ID US |