| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mask checking method and a mask checking system capable of preventing setting miss of a mask or mixing up a substrate to be processed in a manufacturing process of a color filter. <P>SOLUTION: The checking system comprises a memory device 1 for management of manufacture instruction information that instructs a mask to be used for manufacture, a mask having a two-dimensional code imparted, a substrate to be processed having a two-dimensional code imparted, a reading machine 5 characterized by reading the two-dimensional codes, and a processing device 2 characterized by checking the read two-dimensional code information with the instructed manufacture instruction information. As the manufacture instruction information is checked through the device, manufacture due to erroneous checking can be prevented. <P>COPYRIGHT: (C)2008,JPO&INPIT |
