主权项 |
1. A detection device comprising:
a readout circuit formed in a first semiconductor substrate, a detection circuit hybridized on a first main surface of the readout circuit, a cooling system thermally connected to the detection circuit and to the readout circuit, a cold finger configured to enable cooling of the readout circuit by the cooling system, wherein the cold finger comprises at least one side wall defining a confinement channel of a cooling gas originating from the cooling system, said at least one side wall being at least partially formed by an area made from amorphous metal alloy so as to form a thermal insulator, and wherein the amorphous metal alloy is selected from the group consisting of Zirconium/Aluminium/Nickel/Copper alloys, Zirconium/Titanium/Copper/Nickel/Beryllium alloys, Iron/Nickel/Phosphorus/Boron alloys, Iron/Boron alloys, Iron/Nickel/Chromium/Phosphorus/Boron alloys, Palladium/Nickel/Copper/Phosphorus alloys, Palladium/Nickel/Phosphorous alloys, Iron/Cobalt/Yttrium/Boron alloys, and Cobalt/Nickel/Iron/Silicon/Boron alloys. |