The present disclosure provides a CMP pad conditioning tool with at least one integral abrasive protrusion. The present disclosure further provides a method for preparing this CMP pad conditioning tool, along with a method for using said tool to condition a CMP pad.
申请公布号
AU2011349393(B2)
申请公布日期
2016.11.10
申请号
AU20110349393
申请日期
2011.12.20
申请人
Diamond Innovations, Inc.
发明人
Ruland, Gary E.;Rarey, Charles;Easley, Thomas Charles;Graham, James;Schweizer, Mark