| 摘要 |
<p>A capacitive pressure transducer (110) includes a conductive diaphragm positioned between pneumatically separated chambers. The diaphragm is fixed and sealingly coupled at its periphery to the peripheral rim (116) of a concave body member. The diaphragm (140) is supported in tension by the peripheral rim (116) of a concave body member. An electrode assembly (150), supported by the body member (120, 130), establishes a substantially planar conductive surface opposite to and spaced apart by a nominal gap from the conductive diaphragm. The body member includes a yieldable portion that is adapted to radically expand its peripheral rim (116) in response to forces applied to the body member. When the forces are aplied, the body member becomes strained beyond its elastic limit and takes a permanent set whereby the peripheral rim (116) is expanded and the diaphragm becomes tensioned.</p> |
